M.SETEK Co.,Ltd. M.SETEK
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hatogaya Plant

Hatogaya Plant

Technology hatogaya Plant

Hatogaya Plant

Since 1979, M.Setek has been developing and manufacturing a wide range of semiconductor production equipment, based on our unique technologies and ideas. We are also engaged in the development of the wire sawing systems essential to photovoltaic cell manufacture.

Equipment introduction

1. Semi-Automatic Coater/Developer
For 4"～6", (Other, 8" model is prepared)
MS-111-Semi-Automatic Coater
MS-114 Semi-Automatic Developer


MS-111

2. Automatic Coater/ Developer (For 8")
VR series (1 cup, 2 cup)
VICD-8000
It equips with 4 cassettes and Concurrent running (Bake, Coat, Develop) is possible.


VRC/D-8000
VICD-8200

3. Scrubber, Etching system (For 8")
Scrubber : Selectable cleaning method with spray or high pressure.
Etching system: For chemical etching of UBM


VS-8000
VE-8000

4. Lift off system




VL-6000
5. 12" Line up


VE-12000 12" SPIN ETCHING SYSTEM


VRC-12000 12" SPIN COATER
VRFD-12000 12" DRY FILM DEVELOPER

| Technology | Hatogaya Plant |

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Copyright©2005 M.SETEK Co.,Ltd. All Rights Reserved.
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